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File list
 
Date Name Thumbnail Size Description Versions
11:10, 23 August 2019 Topview poc2.png (file) 18 KB Improved orientation of lens. 1
11:04, 23 August 2019 Sideview poc2.png (file) 10 KB Curved side should be orientated to the beam so the sum of refracted and incident angles is minimized. 1
10:59, 23 August 2019 Sideview poc.png (file) 10 KB fixed lens orientation 3
10:58, 23 August 2019 Sideviewpoc.png (file) 10 KB curved side should be in direction of collimated bundle to minimize sum of incident and refracted ray angles 1
10:46, 23 August 2019 Jitter.png (file) 21 KB The jitter of the scan head is depicted. It might be that the photo-diode is not hit properly or the time window for the photo-diode is too large. 1
10:35, 23 August 2019 Pocline.jpg (file) 5 KB A pixel is 4.65 x 4.65 micrometers. The specification of the scanner can derived from this image. 1
09:12, 11 June 2019 Array.png (file) 10 KB Depiction of an array of Hexastorms. The different colors are used to signify depth in the image. In the image, two rows are seen with two columns of laser scanners. Column is the horizontal direction. Naturally, multiple rows and columns might be used... 1
08:08, 11 June 2019 Topview poc.png (file) 18 KB added two cylindrical lenses 1
07:32, 11 June 2019 Hexastorm poc.png (file) 191 KB POC is different from kickstarter. I added two cylindrical lenses and removed mirror. 1
07:19, 11 June 2019 Laserscanner kickstarter.png (file) 879 KB removed mirror, added two cylindrical lenses 2
13:24, 2 December 2018 Topviewcylindrical.png (file) 36 KB Top view of the cylindrical fix. 1
13:22, 2 December 2018 Sideviewcylindrical.png (file) 13 KB Side view of the cylindrical fix of the cross scan error. 1
08:39, 15 May 2017 Rotatingfoil.png (file) 22 KB rotating foil 1
06:30, 15 May 2017 Throughdouble.png (file) 35 KB A through with two protrusion. 1
04:04, 15 May 2017 Applicatorbar.png (file) 13 KB combination of two applicator bars with a transparent polygon scanners 1
07:34, 12 May 2017 Glassthrough.png (file) 21 KB through made of glass with silicone layer and through made of flex vat 1
11:23, 28 April 2017 Plateliquid.png (file) 17 KB Draft of transparent polygon scanner with immersion lithography. The polygon scanner must of course be moved with respect to the wafer. 1
09:42, 28 April 2017 Transparentfoilglass.png (file) 19 KB Recoating mechanism with a moving foil and static glass plate. The glass plate is used to increase a static reference substrate. 1
09:28, 28 April 2017 Lidar.png (file) 37 KB changed position polygon and therewith improved drawing a bit 2
11:50, 24 April 2017 Transparentfoil.png (file) 31 KB transparent foil applied in combination with a transparent polygon in upward or downward projection 1
06:15, 14 April 2017 Dynamic3.bmp (file) 9 KB Picture of a hexagonal prism at a speed of 67 hertz. Only a single facet is shown. The small feature is two laser pulses and the large feature is four laser pulses long. The laser frequency is 100 kHz. The image is saved as bitmap to ensure analysis is... 1
05:58, 14 April 2017 Static1.bmp (file) 2 KB Picture of a single spot. The picture is stored as bitmap so image analysis is still possible. The spot is clearly elliptical. The short axis is 24.43 micrometers and the long axis 29.56 micrometers. The diameter of the spot is therefore roughly 60 mi... 1
05:16, 14 April 2017 Dynamic2.bmp (file) 21 KB Picture of four facet prism at a speed of 67 hertz. The small feature is two laser pulses and the large feature is four laser pulses long. The laser frequency is 100 kHz. The image is saved as bitmap to ensure analysis is still possible. 1
05:12, 14 April 2017 Dynamic1.bmp (file) 24 KB Example of large cross scan error. The small feature has was made with 2 laser pulses at 100 kHz. The large feature was made with 4 laser pulses at 100 kHz. The prism had four facets. 1
04:21, 14 April 2017 Simulation.png (file) 7 KB An example of the simulation result in Rayopt 1
04:13, 14 April 2017 Sideview.svg (file) 19 KB Arrows were not shown correctly, now used plain svg as filetype. 2
04:09, 14 April 2017 Polygontilt.svg (file) 12 KB forgot error polygon tilt 3
11:59, 13 April 2017 Topview.svg (file) 25 KB top view of transparent polygon scanner 1